简历详情

Convolutional Neural Network (CNN) Based Process Window Analysising for Lithography

期刊: 2024 Conference of Science and Technology for Integrated Circuits (CSTIC)  2024
作者: Zeyang Chen,Jiahui Zuo,Tianhao Huang,Pan Liu,Yuanzheng Cui,Sheng Li,Guodong Zhou*
DOI:10.1109/cstic61820.2024.10531893

基于图像切分和卷积神经网络的光刻工艺窗口分析方法

作者: 陈泽阳 · 周国栋 · 刘攀 · 黄天昊 · 高大为