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Fabrication of blazed gratings by tilted reactive ion beam etching with the side mask for augmented reality applications

CUI-LAB , 宁波东方理工大学

Fabrication of high aspect ratio AFM tips by surfactant added TMAH etching

CUI-LAB , 宁波东方理工大学

Fabrication of high aspect ratio atomic force microscope probes using focused ion beam milled etch mask

CUI-LAB , 宁波东方理工大学

Fabrication of high aspect ratio diamond tip using reactive ion etching

CUI-LAB , 宁波东方理工大学

Fabrication of hollow silicon microneedles using grayscale lithography and deep reactive ion etching

CUI-LAB , 宁波东方理工大学

Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask

CUI-LAB , 宁波东方理工大学

High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures

CUI-LAB , 宁波东方理工大学

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