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Magnetic MEMS Devices and Some Application

简介 Focus on Biomedical, Current Detection, Non-destructive testing, Neural microelectrode. et. al.

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Non-Contact Current Sensing System Based on the Giant Magnetoimpedance Effect of CoFeNiSiB Amorphous Ribbon Meanders

2024
期刊 Micromachines
A sensitive non-contact sensing system based on the CoFeNiSiB amorphous ribbon giant magnetoimpedance (GMI) effect is proposed for current testing. The sensing system consists of a GMI probe, a sinusoidal current generator, a voltage follower, a preamplifier, a low-pass filter, and a peak detector. Four different GMI probes derived from amorphous ribbon meanders are designed and fabricated through MEMS processes. GMI probes were driven by a 10 MHz, 5 mA AC current. A permanent magnet was used to provide a bias magnetic field for the probe. The effect of the bias magnetic field on the output DC voltage was investigated. This non-contact current sensing system exhibits good sensitivity and linearity at a bias magnetic field Hbias = 15 Oe. The sensitivity can reach up to 24.2 mV/A in the ±1.5 A range.