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High-Quality AlN Film Grown on Sputtered AlN/Sapphire via Growth-Mode Modification
2018
期刊
Crystal Growth & Design
作者
Chenguang He
· Wei Zhao
· Hualong Wu
· Shan Zhang
· Kang Zhang
· Longfei He
· Ningyang Liu
· Zhitao Chen
· Bo Shen
- 卷 18
- 期 11
- 页码 6816-6823
- American Chemical Society (ACS)
- ISSN: 1528-7483
- DOI: 10.1021/acs.cgd.8b01045
